For the removal of fluorpolymer from TSV, the industry standard post-etch residues removals are used. Although they demonstrate good cleaning efficiency, they contain hazardous components. For example, EKC 265 from Dupont, which is widely used, contains hydroxylamin, brenzcatechin and hydrochinon which are registered as cancerogenic under REACH.
The challenge in the search for sustainable alternatives is that they should not only not be bio accumulative nor CMR (carcinogenic-mutagenic-reprotoxic) but also effective and cost efficient.
One of such newly developed substitutes is TechniClean D-BOS 390 from Technic France. According to MSDS this solution is non-toxic, non-flammable, nucleophilic-based mixture. In this session post-etch residues removal using D-BOS 390 chemistry on TSV with aspect ratio about 3:1 will be described and the achieved results will be demonstrated.
What to expect from our online sessions:
In our 45-minutes expert sessions we would like to present to you trending topics in a technical presentation. Afterwards, our experts will be available for your questions and comments and a joint discussion. New topics and dates for this workshop series will be published regularly on this webpage.
More information and registration (free of charge!) you can find on our website:
https://www.izm.fraunhofer.de/en/news_events/trainings-and-workshops/materials-f...
Next dates & topics:
05.12.: Recycled Plastics in Electronics: Challenges & Opportunities (Theresa Marie Aigner & Ronja Scholz)
Information on participating / attending:
Participation is free of charge, registration is required. This workshop series aims to address our customers, partners and interested parties from industry, politics and science.
Date:
11/21/2023 16:00 - 11/21/2023 16:45
Event venue:
MS Teams I Online
13355 Berlin
Berlin
Germany
Target group:
Business and commerce, Scientists and scholars
Email address:
Relevance:
transregional, national
Subject areas:
Electrical engineering, Environment / ecology
Types of events:
Seminar / workshop / discussion
Entry:
11/07/2023
Sender/author:
Susann Thoma
Department:
Presse- und Öffentlichkeitsarbeit
Event is free:
yes
Language of the text:
English
URL of this event: http://idw-online.de/en/event75649
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