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Image for: Mehr Effizienz für die Halbleitertechnologie


Aufnahme unter dem Rasterelektronenmikroskop: Die Empa-Forscher untersuchten mit einer feinen Diamantpyramide, dem Nanoindentor (von engl. intend: eindrücken), wie die Risse beim Ritzen von Silizium-Wafers entstehen.
Aufnahme unter dem Rasterelektronenmikroskop: Die Empa-Forscher untersuchten mit einer feinen Diamantpyramide, dem Nanoindentor (von engl. intend: eindrücken), wie die Risse beim Ritzen von Silizium-Wafers entstehen.

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