Torsten Boeck vom IKZ vor der Anlage, in der dünne Siliziumschichten wachsen. Zu seiner Themengruppe gehören Andrea Kramer, Hans-Peter Schramm, Thomas Teubner und Peter-Michael Wilde. Unterstützt werden sie dabei von Wolfram Miller und Klaus Böttcher (numerische Simulation) und Uwe Jendritzki (Anlagentechnik).
Source: Foto: Zens / FVB
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