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03/18/2009 - 03/19/2009 | Braunschweig

PTB Workshop on Scatterometry and Ellipsometry on Structured Surfaces

Contents:
- dimensional metrology on structured surfaces using scatterometry and related methods
- applications in semiconductor industry and beyond
- discussion of basic principles, modeling, methods

The workshop is intended for suppliers, operators, fundamental and applied researchers

Information on participating / attending:
Registration fees: 250,00 EUR
Early registration (receipt of fees until 31 December, 2008): 200,00 EUR

Registration deadline: 15 February (receipt of fees)

Further information and online registration:
http://www.scatterometry-ptb.de/

Date:

03/18/2009 09:00 - 03/19/2009 18:00

Event venue:

Physikalisch-Technische Bundesanstalt (PTB)
Bundesallee 100
38116 Braunschweig
Niedersachsen
Germany

Target group:

Scientists and scholars

Email address:

Relevance:

international

Subject areas:

Information technology, Physics / astronomy

Types of events:

Entry:

12/22/2008

Sender/author:

Dipl.-Journ. Erika Schow

Department:

Presse- und Öffentlichkeitsarbeit

Event is free:

no

Language of the text:

English

URL of this event: http://idw-online.de/en/event25760


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