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Galvanoscanners have so far provided reliable services in optical communication in space or in Earth observation via LIDAR. However, in the future, these systems could be replaced by smaller and more compact systems with MEMS scanners. In the MiniLIDAR project funded by the Federal Ministry for Economic Affairs and Climate Protection (BMWK), scientists at the Fraunhofer Institute for Photonic Microsystems IPMS together with partners have developed scanning modules that are now made space-ready. These will be presented for the first time at LASER 2025, from June 24 to 27, 2025, in Munich (Fraunhofer joint booth, booth #415, Hall A2).
In many space applications, vector mirrors are required to deflect laser light: for docking spacecraft to the space station (rendezvous), in the navigation of autonomous service robots and self-driving vehicles, or in small satellites for dynamic object tracking. At Fraunhofer IPMS, a MEMS vector scanning module has now been made ready for space within the MiniLiDAR project.
The module consists of a hybrid integrated 2D MEMS vector scanner that operates through an electromagnetic drive. It features a relatively large mirror with a diameter of 5 mm, which is gimbal-mounted. This allows the scanner to achieve large, quasi-static 2D deflection angles of up to ±13° (mechanically) around a common pivot point. This enables a wide scanning field of 52° x 52° (Field of View) with high positioning dynamics and optical resolution, while the optical system can be designed simply.
Dr. Thilo Sandner, Group Manager Active Micro-Optical Components and Systems at Fraunhofer IPMS, is optimistic: "The new scanning module can now also withstand a rocket launch without damage due to its damped suspension. With a sophisticated design, the module is very small compared to conventional galvanometer scanners, saving space in the overall optical system and consuming about ten times less power, leading to lower system costs. Its solid-state construction (without frictional mechanical bearings) makes it long-term stable and wear-free."
The Jena-Optronik GmbH, with its many years of experience in space technology, is involved in the MiniLiDAR project and is system responsible for the entire LIDAR system. Fraunhofer IPMS has contributed its unique expertise in the design of MEMS scanning mirrors and modules up to automated, high precision micromontage into the project. This has made it possible to achieve the necessary robustness for high shock and vibration resistance.
Initial industry and project partners have already expressed interest in using such modules. Besides in space, the scanning modules can also be used in medical diagnostics and laser therapy in ophthalmology. With a thicker mirror plate, the mirrors are suitable for highly reflective dielectric coatings with high planarity, allowing them to withstand higher laser powers and pulse energies. They can now also be used, for example, in laser marking. Additionally, scanning mirrors can play an important role in free-space optical communication (FSO). The scientists look forward to further exciting applications for which they can optimize the versatile MEMS scanning mirrors.
Ines Schedwill, ines.schedwill@ipms.fraunhofer.de
MEMS vector scanning module with damped suspension for operation in space
Sebastian Lassak
Fraunhofer IPMS
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Elektrotechnik, Physik / Astronomie
überregional
Forschungs- / Wissenstransfer, Forschungsprojekte
Englisch
MEMS vector scanning module with damped suspension for operation in space
Sebastian Lassak
Fraunhofer IPMS
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