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Within the projects MultiLASE (Funding Code 01QE2136C) and UltraLASE (Funding Code 01QE2309C), funded by the Federal Ministry for Research, Technology and Space BMFTR under the Eurostars program, scientists from the Fraunhofer Institute for Photonic Microsystems IPMS, in collaboration with the Danish company Norlase ApS, have developed a compact laser scan module specifically designed for the requirements of highly compact pattern-scanning laser systems for treating eye diseases. The MEMS scan module will be exhibited for the first time at TOUCH Taiwan, from April 8-10, 2026, at booth No. M501.
Innovative laser technologies are used in ophthalmology for a variety of applications, including the treatment of retinal and glaucoma diseases, correction of refractive errors, and OCT-based eye diagnostics.
The use of pattern-scanning lasers for treating retinal diseases offers significant advantages, including a noticeable reduction in treatment time, improved patient tolerance, fewer side effects, and lower dropout rates, along with a substantial cost reduction in clinical and outpatient practice. The unique MEMS scan module enables rapid and precise positioning of the laser beam for specific patterns within a short treatment time of about 1 second, making it advantageous for treating retinal diseases. This module has been designed for potential future use in the LYNX™ system, which sets new standards in ophthalmology.
Small, Light, and Powerful
The Laser Indirect Ophthalmoscope LYNX™ from Norlase is the first of its kind with a pattern-scanning laser. It combines a semiconductor laser source and a scanning mechanism in a lightweight, wireless headset, allowing doctors to perform laser treatments of the retina anytime and anywhere. To enhance the functionality of pattern-scanning lasers, an optimized scan module has been developed in the Eurostars projects MultiLASE and UltraLASE, further increasing the efficiency and precision of treatments.
“The challenge was to miniaturize the scan module to the required dimensions,” explains Dr. Thilo Sandner, project and group leader for Active Microoptical Components and Systems at Fraunhofer IPMS. “The module features a very fast vectorially—i.e., 2D quasi-static—positioning micro-scanning mirror, which, compared to the state of the art, incorporates monolithically integrated position sensors as well as a highly reflective, stress- and temperature-compensated optical coating. This enables the use of the MEMS scanner even at higher laser powers.”
New Application Opportunities for Miniaturized Optical Systems
In addition to the above-mentioned ophthalmic pattern scanning application, the compact, high-precision 2D MEMS vector scan module is ideal for other demanding optical systems with vectorial beam guidance. It can replace conventional, bulky galvanometer scanners, which is beneficial to miniaturize and simplify optical system designs, reducing power consumption and costs. This is especially important to enable new mobile and handheld systems. Potential applications that benefit from the miniaturized vectorial MEMS scan module include, for example, optical diagnostics coherence tomography (OCT) systems for ophthalmology, caries detection or point-of-care, microscopy and endoscopes, or other therapeutic laser systems, such as hand-guided laser surgery instruments for cutting soft (e.g., laryngoscopes) and hard tissue or dermatology. The vectorial MEMS scan module is also interesting for various bio-medical or industrial sensor applications, e.g. optical inspection or thickness measurement, LIDAR systems, free space optical communication (FSO), and optical switching, where optical switch matrices are also feasible with our MEMS technology.
Leveraging a non-gimbaled, quasi-static electrostatic comb-drive architecture, it provides agile and versatile beam steering and has native support for raster, line, dot and spiral scan patterns. The 2.2 mm mirror features a high-reflectivity coating optimised for the 450–600 nm range, ensuring excellent optical throughput, and can support the higher optical power required by various laser applications. With a symmetric ±4° optical scan range on both axes, the scanner offers extensive field coverage for high-resolution imaging and precise targeting. Integrated position sensors enable closed-loop operation, ensuring accurate angle control, repeatability and drift compensation. Meanwhile, the actuator's intrinsic linearity guarantees stable and predictable performance in open-loop modes. This dual-mode flexibility simplifies system integration across a wide range of control schemes.
The MEMS device is packaged in a compact, hermetic enclosure that protects the mirror and mechanics from moisture and particulates, thereby enhancing reliability and long-term stability. Its low power consumption, fast response and tight angular control make it an excellent fit for portable instruments and embedded platforms, where size and performance are equally important.
Finally, the properties of our vector MEMS scanner technology can also be expanded to larger scanning angles and mirror apertures for specific applications if required.
Thanks to Partners for Valuable Support
Fraunhofer IPMS and Norlase thank the industry partner OptiKron for the optical coating of the micro-scanner mirror and for their excellent collaboration. Their expertise was crucial to the success of this project.
With this groundbreaking development, Fraunhofer IPMS and Norlase ApS are setting new standards in ophthalmology and significantly contributing to the improvement of patient care.
Ines Schedwill, ines.schedwill@ipms.fraunhofer.de
https://www.ipms.fraunhofer.de/en/press-media/press/2026/Compact-Pattern-Scan-Mo...
Highly miniaturized vectorial micro-scanner module for use in ophthalmology.
Copyright: Fraunhofer IPMS
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